Yüzey metroloji sistemi

FRT MicroProf MPR 1250

Fries Research & Technology
Equipment Designation: FRT MicroProf® MPR 1250
The FRT MicroProf® MPR 1250 is a high-precision surface metrology system from the MicroProf® series by Fries Research & Technology GmbH (FRT).
These systems are designed for non-destructive and contactless analysis of surface parameters such as topography, roughness, layer thickness, and more.

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Features of the FRT MicroProf:
Device Details:
Model: FRT MicroProf® MPR1250
Article number: 200 00
Sensor type: CWL 300 µm
Serial number: 0904001
Measurement principle: Chromatic confocal point sensor
Light source: Halogen lamp, white light
Vertical resolution: up to 3 nm
Measurement accuracy (Z): 100 nm
Lateral resolution (XY): 2.5 µm
Measurement angle to surface: 90° ±30°
Max. sample size: approx. 310 x 310 x 50 mm

Technical Data (excerpt):
XY Stage:
Type: Compact XY cross table
Travel range (measurement area): 200 x 200 mm
Bearing: Mechanical crossed roller guide
Drive: DC motor with ball screw drive
Position measurement system: Heidenhain glass scale with reference mark
Measurement system resolution: 0.2 µm
Repeatability: < ±1 µm
Perpendicularity XY: < 4 µm / 200 mm
Vertical runout (per axis): < 2 µm / 200 mm

Z Axis (motorized):
Type: Linear axis
Travel: 50 mm (optionally 100 mm)
Drive: Stepper motor with spindle drive
Lateral runout: < 2 µm / 50 mm

Manual Coarse Adjustment (optional):
Type: Dovetail guide
Adjustment range: up to 300 mm sample height

Measurement:
Minimal point spacing (XY): 0.6 µm
Sample size: approx. 310 x 310 x 50 mm
Max. sample weight: 5 kg (optionally 10 kg)
Measuring speed: 1 µm/s up to max. 100 mm/s

System:
Total weight: approx. 275 kg (measurement setup: 225 kg)
Installation footprint (measurement setup): approx. 0.9 x 0.8 m
Dimensions of control unit (W x D x H): approx. 0.55 x 0.53 x 0.32 m
Power supply (EU/US): 110–240 V, 50–60 Hz, 16 A
Power consumption: approx. 300–400 W

Operating conditions:
Temperature range: 22 °C ±5 °C
Temperature stability: < 0.5 °C
Weight approx. 500 kg

Condition:
The device is in very good technical and visual condition.
All axes move precisely and smoothly.

Scope of Delivery:
MicroProf® MPR200 00 XY measuring system
Control unit
Connection cables
(Specifications and technical data are subject to change and error!)

Inspection & testing on site possible by appointment.
We are happy to answer further questions for you by telephone.

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